A mass flow controller(MFC) is commonly used in the semiconductor industries to control the flow rate of various process gases. The measurement and precise control of the of flow rate the gas are the key for a succesful IC fabrication. To eventually design a reliable MFC, a pre-proto type MFC was built and its flow characteristics were investigated. Most of the functional components of the pre-proto type were built for the present study, but the remainder were adopted from a commercial unit. The flow control characteristics were compared with that of a standard MFC. Major dimensions of an MFC for 0-10 SLM capacity were suggested.