- 분무열분해법으로 성장한 $Ru_{1-x}Ir_xO_2$ 박막의 구조와 전기적 특성
- ㆍ 저자명
- 서동주,이관교,이재연
- ㆍ 간행물명
- 韓國眞空學會誌
- ㆍ 권/호정보
- 1996년|5권 1호|pp.67-72 (6 pages)
- ㆍ 발행정보
- 한국진공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
$RU_{1-x}Ir_xO_2$ films were deposited on the quartz substrate by a spray pyrolysis method. The x-ray diffraction patterns showed that the structure of the $RU_{1-x}Ir_xO_2$ film was tetragonal and the lattice constant $a_o$ and $c_o$ were increased from 4.495 A to 4.058 A and from 3.092A to 3.156 A, respectively as the Ir composition varied from 0.0 to 1.0. The $RU_{1-x}Ir_xO_2$ film was metallic and the resistivity of the samples was increased from $7{ imes}10^{-5}{Omega} extrm{cm}$ to $48{ imes}10^{-5}{Omega} extrm{cm}$ with increasing the Ir x. The surface of the sample was slightly roughed, the grain size and the grain boundary width were increased as the Ir composition varied from 0.0 to 1.0.