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MOVPE GROWTH OF HgCdTe EPILAYER WITH ARSENIC DOPING
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  • MOVPE GROWTH OF HgCdTe EPILAYER WITH ARSENIC DOPING
  • MOVPE GROWTH OF HgCdTe EPILAYER WITH ARSENIC DOPING
저자명
Suh. Sang-Hee,Kim. Jin-Sang,Song. Jong-Hyeong,Kim. Je-Won
간행물명
한국표면공학회지
권/호정보
1996년|29권 5호|pp.325-329 (5 pages)
발행정보
한국표면공학회
파일정보
정기간행물|ENG|
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

We report on p-type arsenic doping of metalorganic vapor phase epitaxially (MOVPE) grown HgCdTe on (100) GaAs. HgCdTe was grown at $370^{circ}C$ in a horizontal reactor with using dimethy-cadmium, diisoprophyltelluride, and elemental Hg. We used tris-dimethylaminoarsenic (DMAAs) as the metalorganic for p-doping. 4micron thick CdTe and subsequently 10micron thick HgCdTe were grown on (100) GaAs substrate. Interdiffused multilayer process in which thin CdTe and HgTe layers are grown alternately and interdiffused to obtain homogeneous HgCdTe alloys was used. Arsenic was doped during CdTe growth cycle. After growth HgCdTe was annealed at $415^{circ}C$ for 15 min and then annealed again at $220^{circ}C$ for 3 hr, both with Hg-saturate condition. We could obtain p-doping from 2.5$ imes$$10^{16}$ to 6.6$ imes$$10^{17}$$cm^{-3}$, depending on the DMAAs partial pressure. With the dual Hg-annealing, activation of arsenic was aboutt 90%, which was confirmed by SIMS measurement. With only low temperature annealing at $220^{circ}C$ for 3hr, activation efficiency was about 50%.