- 대향타겟스퍼터링으로 제작된 박막의 결정 배향성
- ㆍ 저자명
- 김경환,손인환,송기봉,신촌수양,중천무수,직강정언
- ㆍ 간행물명
- 한국표면공학회지
- ㆍ 권/호정보
- 1998년|31권 4호|pp.217-222 (6 pages)
- ㆍ 발행정보
- 한국표면공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
The Facing Targets Sputtering(FTS) system has several advantages for preparing films over a wide range of working gas pressure on plasma-free substrates. Co-Cr thin films seem to be one of the most promising media for perpendicular magnetic recording system. In this study, the capabillities of the system fordepositing C0-Cr films have been investigated. Under various Ar gas pressure, films with morphologically dense microstructure and good c-axis orientation were deposited, even when the incident angle $psi_x$ of sputtered part icles to the film plane was below abount $50^{circ}C$. this may imply that the shadowing effect by obique incidence of particle can be compensated by rapid surface diffusion owing to the high kinetic energy of particles arriving at the growing film. It has been confirmed that the FTS system is very useful for perparing Co-Cr thin films recorging media.