- Tribology특성 향상을 위한 Ag 박막의 형성과 평가에 관한 연구
- ㆍ 저자명
- 이경황,이상기,송복한,정병진,박창남,문경만,이명훈
- ㆍ 간행물명
- 한국표면공학회지
- ㆍ 권/호정보
- 2000년|33권 5호|pp.319-328 (10 pages)
- ㆍ 발행정보
- 한국표면공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
Silver is known to have such characteristics as low shear strength, good transfer-film forming tendency, and good corrosion resistance. Silver thin films have been prepared by ion plating of physical vapour deposition (PVD) using both argon gas pressure and bias voltage of processing condition. After the silver films were prepared, the properties in them were examined by gas pressure and bias voltage of substrate. Their morphology and crystal orientation were investigated by scanning electron microscopy (SEM) and X-ray diffractor. The properties of film were, also, studied to relate with morphology, X-ray diffraction pattern, and friction coefficient at vacuum ambient. The friction coefficient was stabilized remarkably on deposited films with increasing argon pressure for deposition. Also, the effect of increasing of the bias voltage for deposition resulted in lower friction coefficient and stability in $1.7$ imes$10^{-4}$</TEX> torr. On the contrary, behavior of friction coefficient was stabilized on deposited films with decreasing the bias voltage in $1.7$ imes$10^{-5}$</TEX> torr for deposition.