- 고정밀 레이저 가공 기술을 이용한 PRT 제작 및 특성 분석
- ㆍ 저자명
- 노상수,서정환,정귀상,김광호
- ㆍ 간행물명
- 전기전자재료학회논문지
- ㆍ 권/호정보
- 2003년|16권 1호|pp.46-52 (7 pages)
- ㆍ 발행정보
- 한국전기전자재료학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
In this paper, we fabricated PRT(platinum resistance thermometers) with the trimming technology using high fine laser system. U. V.(wavelength: 355nm) laser was mainly used for adjusting Pt thin films resistors to 100Ω at 0$^{circ}C$. Internationally, the accepted A-class tolerance of temperature sensor is ${pm}$0.06Ω at 0$^{circ}C$. according to DIN EN 60751. The width of trimmed lines was about 10$mu extrm{m}$ and the best trimming conditions of Pt thin films were power : 37mW, frequency : 200Hz and bite size:1.5$mu extrm{m}$. And 96 resistors, fabricated by photolithography and etching process, have 79∼90Ω and 91∼102Ω as the proportion of 45.7% and 57.3%, respectively. As result of sitting Pt thin films resistors to the target value(109.73Ω at 25$^{circ}C$), 82.3% of all resistors had the tolerance within ${pm}$0.03Ω and the others(17.7%) were within ${pm}$0.06Ω of A-class tolerance. The PRTs which wore fabricated in this research had excellent characteristics as follows; high accuracy, international standard TCR(temperature coefficient of resistance) value, long-term stability, wide temperature range, good linearity and repeatability, rapid response time, etc.