- 압전 작동기로 구동되는 젯팅 디스펜서의 설계 및 제어
- ㆍ 저자명
- 최민규,구오흥,윤보영,최승복,Choi. Min-Kyu,Nguyen. Quoc-Hung,Yun. Bo-Young,Choi. Seung-Bok
- ㆍ 간행물명
- 한국소음진동공학회논문집
- ㆍ 권/호정보
- 2006년|16권 11호|pp.1165-1171 (7 pages)
- ㆍ 발행정보
- 한국소음진동공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
This paper presents a new type of jetting dispenser for the integrated circuit (IC) fabrication and surface mount technology The proposed system is featured by the piezoelectric actuator and hydraulic magnification device. After describing structural component of the dispensing mechanism and its operation principle, both the fluid modeling and the hydraulic magnification modeling are undertaken with a lumped-parameter method based on the analogy of the fluid system and mechanical system. A mathematical governing equation is then derived by integrating the fluid model with the mechanical model of the driving piston and piezoelectric actuator. Subsequently, in order to achieve a desired dispensing amount, control algorithm adjusting duty cycle of the driving voltage is synthesized and control responses are presented in time domain.