- 정전압에 따른 클린룸 벽체에서의 입자침착 특성
- ㆍ 저자명
- 노광철,손영태,김종준,오명도,Noh. Kwang-Chul,Son. Young-Tae,Kim. Jong-Jun,Oh. Myung-Do
- ㆍ 간행물명
- 설비공학논문집
- ㆍ 권/호정보
- 2006년|18권 12호|pp.1033-1038 (6 pages)
- ㆍ 발행정보
- 대한설비공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
We carried out the experiments on particle deposition onto the cleanroom wall panels. And then we investigated the particle deposition characteristic coefficients for electrostatic voltages and particle size. It was found that there is little difference in characteristics of the particle deposition between the steel panel and the anti-static coating panel. In case of that the particle size is under $1.0{mu}m$, the particle deposition characteristic coefficient becomes larger as the electrostatic voltage induced to the cleanroom wall panel is increasing. Where in case of that the particle size is over $3.0{mu}m$, the particle deposition characteristic coefficients do not show any differences with the electrostatic voltages. It is due to that the electrostatic force is the major particle transport mechanism for submicron particles, while the gravitational settling is the major particle transport mechanism for overmicron particles when the electro-static voltages are induced to the cleanroom wall panel.