- 수소 Plasma 처리 후의 MgO 보호막에 대한 일함수 변화 측정
- ㆍ 저자명
- 정재천,이석주,조재원,Jeong. Jae-Cheon,Rhee. Seuk-Joo,Cho. Jae-Won
- ㆍ 간행물명
- 전기전자재료학회논문지
- ㆍ 권/호정보
- 2007년|20권 7호|pp.611-614 (4 pages)
- ㆍ 발행정보
- 한국전기전자재료학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
The changes in the work $function({Phi}_w)$ in the MgO protective layers after $plasma(Ar,;H_2)$ treatment have been studied using ${Upsilon}-focused$ ion beam $({Upsilon}-FIB)$ system. The ${Phi}_w$ was determined as follows: Ar-plasma $treatment({Phi}_w=4.52eV)$, $H_2-plasma$ $treatment({Phi}_w=5.65eV)$, and non-plasma $treatment({Phi}_w=4.64eV)$. The results indicated that the H-plasma could not make any effective physical etching due to the small masses of hydrogen atoms and molecules while the hydration of H-plasma could grow some contaminating materials on the surface of MgO.?