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Simulation of outgassing effects of vacuum materials on vacuum characteristics
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  • Simulation of outgassing effects of vacuum materials on vacuum characteristics
  • Simulation of outgassing effects of vacuum materials on vacuum characteristics
저자명
Kim. Hyung-Taek,Kim. Young-Suk
간행물명
반도체및디스플레이장비학회지
권/호정보
2009년|8권 1호|pp.7-12 (6 pages)
발행정보
한국반도체및디스플레이장비학회
파일정보
정기간행물|ENG|
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기타
이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
서지반출

기타언어초록

The outgassing effects of selected vacuum materials on the vacuum characteristics were simulated by the $VacSim^{Multi}$ simulation tool. This investigation examined the feasibility of reliably simulating the outgassing characteristics of common vacuum chamber materials (aluminum, copper, stainless steel, nickel plated steel, Viton A). The optimum design factors for these vacuum systems were suggested based on the simulation results. The baking-out effects of the modeled systems and materials on the performance of the vacuum system were also analyzed. The simulation predicted that the overall outgassing effect was more significant in the TMP system than in the DP system and that the utilization of a booster pump has a greater effect on the evacuation time than on the ultimate pressure.