Trichloromethylphosphonyl dichloride was prepared by the aluminium chloride method. We synthesized several heterocyclic compounds containing phosphorus atom by the stepwise esterification of trichloromethylphosphonyl dichloride with ethylene glycol, 2-mercaptoethanol, ethylene diamine, and 2-aminoethanol and the resulting heterocyclic compounds are 2-trichloromethyl-1,3,2-dioxa-, 2-trichloromethyl-1,3,2-thioxa-, 2-trichloromethyl-1,3,2-diaza-, 2-trichloromethyl-1,3,2-diaza-, and 2-trichloromethyl-1,3,2-oxazaphospholane-2-oxide. The best results were obtained in the solution of triethylamine as hydrochloric acid trapping agent. The structure of five-membered heterocyclic phosphonates were characterized by their IR, NMR, and elementary analysis and the mass spectra of the compounds were analyzed.