This paper deals with residual stress characteristics of ion-nitrided metal which is primarilly concerned with the effects of added carbon content in gas atmosphere. A small optimal amount of carbon content in gas atmosphere increase compound layer thickness, as well as to increase diffusion layer thickness and hardness. The residual stress and deflection of the specimens was measured in various elevated temperature at the surface of ion-nitrided metal and the internal stress distribution was calculated. It is found that compressive residual stress at the compound layer is largest at the compound layer, and decreases as the depth from the surface increases.