- INTEGRATED MAGNETIC SENSORS: AN OVER VIEW
- INTEGRATED MAGNETIC SENSORS: AN OVER VIEW
- ㆍ 저자명
- Cristolovenau. Sorin
- ㆍ 간행물명
- 電子工學會雜誌
- ㆍ 권/호정보
- 1986년|13권 1호|pp.86-95 (10 pages)
- ㆍ 발행정보
- 대한전자공학회
- ㆍ 파일정보
- 정기간행물|ENG| PDF텍스트
- ㆍ 주제분야
- 기타
The basic physical principles involved in the operation of monolithic magnetic sensors are reviewed and technological aspects outlined. More or less conventional devices based on Hall effect, magnetoresistance or current path deflection are described. It is shown that such sensors with 2, 3, 4 or 5 terminal contacts are achievable with standard silicon integrated circuit process. Several kinds of magnetodiodes (p+nn+,p+n, Schottky, MOS, memory, CMOS) have been fabricated on Si and on SOS films and present attractive properties. Finally, the magneto-transistor family is discussed with emphasis to split-terminals, CMOS, unijunction and fila-mentary devices.