The relative electrical conductivity of vacuum deposited Al films on a soda-lime(2947) and an alumino boro silicate(7809) glass was investigated with the variation of the relative humidity,temperature and film thickness. The structure and microstructure of Al films before and after exposure to the humidity wereexamined by the X-ray Diffractormenter(XRD) and Scanning Electron Microscope(SEM). As the relative humidity increased, the electrical conductivity of Al films on both glasses was decreased. However, the Al films on 7809 glass showed higher conductivity than that of 2947 glass under the same testing conditions. The decreasing of electrical conductivity was caused by the formation of Aluminum hydroxide which was made by the reaction between the aluminum films and water vapor.