- 레이저 간섭장치를 이용한 높이마이크로미터 교정장치의 개발
- ㆍ 저자명
- 엄태봉,양상희,우인후,임재선,정명세,Eom. Tae-Bong,Yang. Sang-Hee,Woo. In-Hun,Lim. Jae-Sun,Chung. Myung-Sai
- ㆍ 간행물명
- 정밀공학
- ㆍ 권/호정보
- 1988년|5권 3호|pp.43-47 (5 pages)
- ㆍ 발행정보
- 한국정밀공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
Height micrometer is a kind of end standards. It consists of a stack of gage blocks which is capable of moving up and down by a micrometer head. Height micrometer requires calibration with very high accuracy because its resolution is generally 1 .mu. m and its accuracy is higher than few micro- meters. Conventionally, comparison with gage blocks is used to calibrate height micrometer, but it is less accurate and time consuming method. A height micrometer calibration system using a laser interferometer instead of gage blocks has been developed. The measuring range of the system is 300mm, and the accuracy is better than ${pm}0.5{mu}m$ A new method of maintaining the laser-beam alignment is described as well.