The purpose of this study was to evaluate the canal preparation time, deviation of the apex (Zipping), and debridement effect of the canal of three canal preparation techniques. Thirty extracted 1st and 2nd molars were divided into 3 groups and each group was enlarged by ultrasonic, sonic or hand instrument. The specimens were examined under scanning electron microscope and light microscope. The results were as follows: 1. In the canal preparation time, ultrasonic group was the shortest, followed by sonic, hand group. All pairs of groups were significantly different at the 0.05 level. (P < 0.05) 2. In the deviation of the canal, no two groups were significantly different at the 0.05 level. (P > 0.05) 3. In the evaluation of debris scores, ultrasonic and sonic groups were better debridement effect than hand group in the fine canals. In the large canals, ultrasonic group was the best results, followed by sonic, hand group. 4. In the evaluation of smear layer scores, ultrasonic group was the best and sonic and hand group were same effect in the fine canals. In the large canals, three groups were same effect. 5. In the effect of the removal of predentin and pulpal debris, in the regardless of canal size, three groups were same and pulpal debris was not completely removed by either technique.