- CVD법으로 합성된 알루미나 박막 및 분말의 열처리에 따른 특성
- ㆍ 저자명
- 최두진,정형진
- ㆍ 간행물명
- 요업학회지
- ㆍ 권/호정보
- 1989년|26권 2호|pp.235-241 (7 pages)
- ㆍ 발행정보
- 한국세라믹학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
A study on the APCVD(atmospheric pressure chemical vapor deposition) Al2O3 was done by using the aluminum-tri-isopropoxide/N2 reaction system at 40$0^{circ}C$. When the flow rate of the carrier gas(N2) was over 2SLPM, heterogeneous reaction was observed. However, when the flow rate of the carrier gas was below 2SLPM, a porously deposited film or powder formation was observed. The film formed by a heterogeneous reaction was optically dense. The dense film is thought to be a kind of a hydrated alumina. After a thermal treatment of the film in the range of temperature from $600^{circ}C$ to 1, 20$0^{circ}C$, properties of the film seems to be changed due to dehydration and densification process. In the case of the powder on heat treatment(600~1, 20$0^{circ}C$), both a phase transformation and the change of OH peak was observed.