The objective of this paper is to design the variable structure system(VSS) controller for the tracking control of excavator which is driven by electro-hydraulic servomechansim. It is generally agreed that the dynamic characteristics of the robot arm such as excavator are coupled, time varying, and highly nonlinear, and also hydraulic system contains nonlinear characteristics in itself, so performing exact position control and trajectory tracking control need remarkable consideration. To solve this porblem, this system was designed as a variable structure system. The salient feature of VSS is that the sliding mode occur on a switching surface. While in sliding mode, the system remains insensitive to parameter variations and disturbances. This control algorithm was applied to a hydraulic excavator by simulaltion and to a simulator by experiment. And its effectiveness was verified. And the results of VSS for the electro-hydraulic excavator was compared with that of the PID when load disturbances and system parameter variations exist.