The solid state detector system was constructed using commercially available rectifier diode for the assessment of quality assurance in radiotherapy. Dosimetry system which consists of the electrometer and the water phanton was used for measuring small field size scanning. The measured results, which had linearity in accordance with variation of radiation dose for gamma-ray of Co- 60 and 6 and 10MV photons of linear accelerator, showed quite linear characteristics within 1% error. The percent depth dose of 10MV photon of Mevatron KD linear accelerator was measured in small field size using diode, and the results were compared with that of using ion chambers. The results show that the difference of percent depth dose between the value of diode and that of ion chamber was negligible in large field size. However, in small size less than 4$ imes$4cm, the difference of percent depth dose estimated by diode and ion chamber was 4.7% by extrapolation to 0$ imes$0cm. Considering the smaller volume of diode than that of ion chamber, it might be more reliable to use diode for estimating percent depth dose. Above results suggest that diode can be used for routine check such as beam profile, flatness, symmetry and energy