Spherical fine BaTiO3 powders with an average diameter of 0.3${mu}{ extrm}{m}$ to 0.9${mu}{ extrm}{m}$ are prepared at 100$0^{circ}C$ by the ultrasonic spray pyrolysis of solutions containing Ba(NO3)2 and TiCl4. Experimental variables are adjusted to produce BaTiO3 powders and its effect on the phase, the size and the morphology of the particles are investigated by XRD, SEM, TEM. Each particle consists of small primary particles and has a hollow around its center. The dependence of particle diameters on the concentrations of source solutions indicates that metal salt precursors are dried to precipitate solid particles and decompose to form BaTiO3 phase without gas phase reactions.