The practicability of Ion-Sputter machining renders it possible to make diamond stylus for surface roughness measurement with micro stylus tip radius less than 2${mu}mR$, and to measure surface roughness of fine-machined surface. In this study, we researched the wear or Ion-Sputtered stylus with 0.1${mu}mR$ and 0.5${mu}mR$ for micro-figure measurement and polished stylus with 0.5${mu}mR$ according to measurement distance. As a result, we know that the case of Ion-Sputtered stylus is worn down easilier the case of polished stylus. And we know that in the evaluation of stylus wear, it is more useful method that examine the wear by measuring the variation of stylus tip radius than by evaluating the variation of Ra values.