When a crystal is grown by FZ process, the melt zone is located at between the solid of upper and lower side and is kept by the solid-liquid interface tension. On the surface of the melt zone, a surface tension gradient is occured by the difference of temperature and solute concentration, it is the driving force of marangoni flow. The crystal even in the steady state growth can become imperfect for the dislocation distribution and the solute concentration in the peripheral region of the crystal are higher than those in the inner part and the probability of the formation of the defects such as voids, bubble penetration, secondary phase creation and crack is high near the solid-liquid interface. This is because the solid -liquid interface becomes irregular because of the local variation of temperature in that region due to marangoni convection.