3-(Trimethoxysilyl)propylmethyl-S-alkyl sulfonium iodides salts and 4-(2-Trimethoxysilyl)ethyl-N-alkyl pyridinium bromides salts were synthesized with varying the number of carbon atoms in alkyl group from 10 to 18 and with higher yields than previous methods. The reduction rates in no. of colonies and the reactivities of antimicrobial agents onto cellulose were examined by Shake Flask Method, and by Degree of Luminescence from Inductively Coupled Plasma, respectively. Sulfonium salt having 16 and pyridinium salt having 12 carbon alkyl group exhibited the maximum activity. The optimum treatment conditions of these sulfonium salts and pyridinium salts were: concentration 1.0%(owf), treating temperature 30$^{circ}C$, and treating time 30min. Si contents of treated fabrics showed the same result. Hand of treated fabrics was examined by the Kawabata Evaluation System. Water repellency, flame retardancy, and antistatic property were also evaluated. The hand of the treated fabrics became softer and bulkier.