- 졸-겔법에 의한 PLZT 박막의 결정화 및 균열 생성
- ㆍ 저자명
- 안기철,이전국,김호기,노광수
- ㆍ 간행물명
- 요업학회지
- ㆍ 권/호정보
- 1992년|29권 3호|pp.216-222 (7 pages)
- ㆍ 발행정보
- 한국세라믹학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
PLZT thin films were prepared using sol-gel spin coating. The films mainly consisted of perovskite phase when heat treated at 600$^{circ}C$ and in O2 or air atmosphere for 2 hours after 7 coating cycles. Cracks were formed when smaller than after 9 coating cycles. When ITO interlayer existed between Corning 7059 glass substrate and the film, cracks were not formed after 9 coating cycles, but cracks were formed after 11 coating cycles because of large volume change of the film contracting on the substrate during the heat treatment. In the observation of microstructure, the thin films have perovskite phase of about 2 $mu extrm{m}$ grain size and pyrochlore phase of 100∼200${AA}$ grain size.