TiO2 fine powder was synthesized in the gas phase by chemical vapor deposition using hydrolysis of TiCl4. Content of rutile phase in the powder was investigated. Powder characteristics such as size, crystallinity and morphology were also studied by means of TEM, SEM and XRD. Rutile phase in TiO2 powder started to be formed from 100$0^{circ}C$ and the content increased with the reaction temperature and TiCl4 concentration. As the temperature increased from 80$0^{circ}C$ to 140$0^{circ}C$, the primary particle size increased while secondary particle size decreased. Spherical secondary particle with fine primary crystals agglomerated was produced at low temperature of 80$0^{circ}C$ whereas the grown primary particle being final particle size was produced at higher temperature of 140$0^{circ}C$. Other effects of TiCl4 and H2O partial pressures on particle size were also reported in this study.