The motion analysis of a translation device driven by a piezoelectric actuator is performed to identify the mechanics of impact drive mechanism and to find the maximum speed waveform. The translation device is modeled as a semidefinite two-degree-of-freedom system. The motion analysis includes effects of friction force between moving mass and contact surface, dynamics of voltage amplifier and piezoelectric elements, and hysteresis of piezoelectric actuator. Base on the model, simulation studies are carried out and then compared with experimental results. It is found that the error between moving distances obtained by analysis and experiment is less than 15% and that the actual motion of moving mass is well predicted by the analytical work, finally, precision positioning experiments are carried out by using a proximity sensor as a feedback sensor. Position control of moving mass is initiated by the maximum speed waveform and finely tuned by the scaled down waveform so that accurate positioning is accomplished within the resolution of the sensor.