- D.C. Magnetron Sputter를 이용한 (Ti, Al)N 피막의 고온산화특성
- ㆍ 저자명
- 최장현,이상래
- ㆍ 간행물명
- 한국표면공학회지
- ㆍ 권/호정보
- 1992년|25권 5호|pp.235-252 (18 pages)
- ㆍ 발행정보
- 한국표면공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
(Ti, Al)N films were deposited on 304 stainless steel sheet by D.C. magnetron sputtering using Al target and Ti plate. The high temperature oxidation of (T, Al)N films with the variation of composition has been investigated. The chemical composition of (Ti, Al)N films with the variation of composition has been investigated. The chemical composition of (Ti, Al)N films was similar to the sputter area ratio of titanium to aluminum target by means of EDS and AES survey. The high temperature oxidation test of (Ti, Al)N showed that (Ti, Al)N has better high temperature resistance than TiN and TiC films. TiC films were cracked at 40$0^{circ}C$ in air TiN films quickly were oxidised at $600^{circ}C$, were spalled more than $700^{circ}C$. But (Ti, Al)N films are relatively stable to$ 900^{circ}C$. The good resistance to high temperature oxida-tion of (Ti, Al)N films are due to the formation of dense Al2O3 and TiO2 oxide layer. Especially, Al2O3 oxide layer is more important. The results obtained from this study show, it is believe that the (Ti, Al)N film by D.C. magnetron sputtering is promising for the use of high temperature and wear resistance mate-rials.