- 수직형 LPE 장치에 의한 InGaAsP/GaAs 단결성 성장에 관한 연구
- A Study on the Single Crystal Growth of InGaAsP/GaAs by Vertical LPE System
- ㆍ 저자명
- 홍창희,조호성,황상구,오종환,예병덕,박윤호
- ㆍ 간행물명
- 韓國航海學會誌
- ㆍ 권/호정보
- 1992년|16권 2호|pp.21-27 (7 pages)
- ㆍ 발행정보
- 한국항해항만학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
Shortening the lasing wavelength(particularly below infrared ; the visible region) of laser diodes is very attractive because it can provide a wide range of applications in the fields of optical information, measurement, sensor, the development of medical instrument, and optical communication through plastic fibers. According to the recent researches on the field, InGaAsP/GaAs was suggested as a material for red-light laser. In this study, in order to grow InGaAsP/GaAs epitaxial layer on InGaAsP/GaAs by LPE, we used GaP and InP two phase solution technique for 670nm and 780 nm region, respectively. Through the X-ray diffraction measurement for the epitaxial layer grown from the experiments, we found that the lattice mismatch of $In_{0.46}Ga_{0.54}As_{0.07}P_{0.93}$/GaAs and $In_{0.19}Ga_{0.81}As_{0.62}P_{0.38}$/GaAs was about +0.3% and +0.1%, respectively.