Mass transfer experiment by naphthalene sublimation method has great advantages in measurement of local transfer coefficients in the region of a three dimensional flow or for a model of complex geometry, which is considered to be very difficult with conventional heat transfer measurements. Mass transfer data obtained by naphthalene sublimation technique are converted to the heat transfer data through heat/mass transfer analogy. This analogy is valid for a simple or laminar flow, but new insight is needed when applying to a turbulent flow or complex flow such as separation, reattachment and recirculation, The purpose of this research is to investigate how geometries and flow conditions incorporate heat/mass transfer analogy. Mass transfer experiments are performed using naphthalene sublimation technique for a flat plate, a circular cylinder, and rectangular cylinders. And mass transfer data are compared with earlier heat transfer measurements for the same geometries. Usefulness of analogy relation between heat and mass transfer is examined with these results.