Small XeCl laser of charge transfer discharge excitation was fabricated and output charateristics were investigated according to gas mixture ratio. Beam cross section of 2.7cm${ imes}$1.5cm was obtained by constructing excimer laser which preionization is operated automatically and which has chang profile electrode. According to the component gas mixture ratio, the condition of maximum output energy, efficiency were investigated. The maximum energy, efficiency and specific energy were obtained 230 mJ, 1.6% and 1.1 J/l, respectively. The long pulse effect is observed by constructing low peaking to main capacitance ratio of 1:3.