- 비정질 $PbTiO_3$ 박막의 결정화에 관한 연구
- ㆍ 저자명
- 강영민,김상섭,백성기
- ㆍ 간행물명
- 요업학회지
- ㆍ 권/호정보
- 1993년|30권 5호|pp.389-396 (8 pages)
- ㆍ 발행정보
- 한국세라믹학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
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- 기타
We studied the crystallization behavior of amorphous PbTiO3 thin film grown at 30$0^{circ}C$ by RF magnetron sputtering on Pt substrate. Crystallization to full perovskite phase was observed after annealing at 475$^{circ}C$, for 9min, without PbO volatilization. The higher the annealing temperature, the shorter the time required for crystallization. The isothermal kinetic study at 475$^{circ}C$ showed that the Avrami constant was approximately 4, which implies that the crystallization can be characterized by isotropic 3-dimensional growth with a constant nucleation rate. The TEM study revealed that the crystallized thin film was composed of very fine (20~100nm) grains oriented randomly without any evidence of 90$^{circ}$domain boundaries.