- MWCVD에 의한 다이아몬드 필름의 합성과 절삭 공구에의 응용
- ㆍ 저자명
- 서문규,김윤수
- ㆍ 간행물명
- 요업학회지
- ㆍ 권/호정보
- 1993년|30권 11호|pp.979-985 (7 pages)
- ㆍ 발행정보
- 한국세라믹학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
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Diamond films were synthesized using CH4-H2-Ar mixture gases by MWCVD, and cutting ability was tested after brazing them onto WC tools. Growth rates were in the range of 0.5~10${mu}{ extrm}{m}$/hr depending on the deposition conditions, and diamond films with thickness of 100~300${mu}{ extrm}{m}$ were obtained. Diamond tools brazed by RF induction method showed an enhanced cutting ability in the cutting test of Si single crystal rod.