- 열증착에 의한 아연박막 밀착성에 관한 연구
- ㆍ 저자명
- 김영호,김경미,신순범,이상래
- ㆍ 간행물명
- 한국표면공학회지
- ㆍ 권/호정보
- 1993년|26권 1호|pp.11-21 (11 pages)
- ㆍ 발행정보
- 한국표면공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
The relationship between the amount of deposited-Zn and the adhesion of Zn film has beend investigated. This study changed the mild steel substrate temperature range of $100^{circ}C$~$250^{circ}C$, with the aim of studying the adhesion of Zn film coated by PVD on substrates in 10-2~10-3torr and deoxidant gas atmospheres 50%H2~50%N2 and 75%H2+25%N2. The result revealed that the adhesion of Zn film was remarkably good in a 75% H2+25%N2 gas atmosphere as well as deoxidant time was short, and with increasing the substrate tempera-ture up to $250^{circ}C$. Whiled the amount of deposition tended to increase linearly with time at constant evaporation temperature. It was almost constant when the substrate temperature was lower than $200^{circ}C$, slightly decreased between $200^{circ}C$ and $250^{circ}C$ and significantly decreased at $300^{circ}C$.