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솔-젤 회전 코팅법을 이용한 강유전성 $BaTiO_3$ 박막제조
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저자명
배호기,고태경
간행물명
요업학회지
권/호정보
1994년|31권 7호|pp.795-803 (9 pages)
발행정보
한국세라믹학회
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

Ferroelectric BaTiO3 thin film was produced using BaTi-ethoxide sol. This sol was prepared from BaTi-ethoxide by a partial hydrolysis with ammonia as a basic catalyst and ethylene glycol as a chelating agent. BaTiO3 thin film was prepared from three continuous spin-coating layers of the sol on bare Si(100) wafer at 2500 rpm followed by pyrolysis at $700^{circ}C$ for 30 min. After the heat treatment, the film was 0.200$pm$0.010 ${mu}{ extrm}{m}$ thick and its grain size was 0.059 ${mu}{ extrm}{m}$. On the other hand, electrical properties were measured for BaTiO3 thin film separately prepared on Au-deposited silicon wafer. The dielectric constant and loss of the BaTiO3 thin film at room temperature was 150~160 and 0.04 respectively, which was measured at 10 kHz and oscillation level of 0.1 V. In the measurements of the dielectric properties at high temperatures, it was observed that the capacitance of the thin film increases steeply, while the dielectric loss reaches maximum around 1$25^{circ}C$, which corresponds a phase transition from tetragonal to cubic BaTiO3.