This study deals with a position control of an electro-hydraulic servo system which consist of cylinder and high speed on-off valves operated by microcomputer. The merits of PWM control of hydraulic equipment are the robustness of the high spee on-off valve, its low price and the direct control without D/A converter. In the PWM control of high speed on-off valve, the time lag and switching time existing between the input and output signals of valve are considered as demerit points. To get analytical results, the effects of these demerits have to be clarified in detail. The object of this study is to propose a mathematical model for the behavior of high speed on-off valve and to get analytical results of this system. The dynamic characteristics of this system is examined by digital computer simulation analytically and compared with experimental results to varify the proposed mathematical model.