By the use of computer simulation including collisional mixing kinetic processes of the B- and C-state in the upper laser level the output characteristics of electron-beam pumped XeF$(C ightarrowA$ excimer laser are analyzed. We compared the results between experiments and simulations for the $XeF^*(C)$ formation that correlated the number of densities of the $XeF^*(B)$. We obtained good agreement$(28.5 mJpm5%)$ with comparisons between experiment and simulation and confirmed the optimal gas mixing ratio of $Xe/F_2/Ar=5.26/0.49/94.28%$ at atmospheric pressure laser medium under the condition of 70 ns [FWHM] electron-beam (800 kV, 21 kA). Also through the simulation we have investigated that the $XeF^*(C)$ formation channel, the $XeF^*(C)$ relaxation channel, and the absorption channel of bluegreen wavelength region as a function of F2 halogen donor and Xe partial pressure. ssure.