- 졸-겔법을 이용한 $(Ba_{1-x}Sr_x)TiO_3$ 박막의 제조 및 특성
- ㆍ 저자명
- 황규석,김병훈
- ㆍ 간행물명
- 요업학회지
- ㆍ 권/호정보
- 1995년|32권 4호|pp.516-524 (9 pages)
- ㆍ 발행정보
- 한국세라믹학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
In this study, to prepare the dielectric (Ba, Sr)TiO3 thin films by the sol-gel process, Titaminum (IV) sio-propoxide (Ti[OCH(CH3)2]4), Ba and Sr acetate were used for sol and thin films were prepared by dip-coating process. Stability of sol decreased with the increase of Sr, and thickness of thin films were obtained 0.13~0.17${mu}{ extrm}{m}$ by 1 coating cycle. Transmittance of amorphous thin films heated at 500 and 55$0^{circ}C$ was very good, and crystallization tendency of thin films according to heat-treatment temperature and crystallization characteristics of thin films heated at 11$0^{circ}C$ for 3 hrs were analysed. As a result, good perovskite structure was obtained higher than 100$0^{circ}C$, and tetragonality of thin film was decreased but pyrochlore was formed with increasing Sr. In case of addition to substitute 0.4mol% Sr for Ba, dielectric constant was 288 and loss factor (tan $delta$) was 0.04.