In order to investigate the annealing effect for RF magnetron sputtered $Ni_{83}Fe_{17}$ thin films, we have studied the spin wave rehaviors by FMR after annealing the samples at $135^{circ}C,;225^{circ}C$ in air and at $160^{circ}C,;220^{circ}C,;330^{circ}C,;390^{circ}C;and;420^{circ}C$ in argon gas for one hour respectively. In FMR spectra for the films annealed in argon gas and the assputtered film at perpendicular resonance, only odd numrer spin waves are observed. But even numrer spin waves are observed for the film annealed in air at $225^{circ}C$ recause of the large difference retween both surface magnetic anisotropy. In the case of the sample annealed at $420^{circ}C$ in argon gas, the spin waves are shifted toward high field, can due to the increase of saturation magnetization during annealing. The spacings retween the spin wave resonance fields are narrowed rapidly, this is thought that the magnetic homogeneity increased in the film after annealing at high temperature.