기관회원 [로그인]
소속기관에서 받은 아이디, 비밀번호를 입력해 주세요.
개인회원 [로그인]

비회원 구매시 입력하신 핸드폰번호를 입력해 주세요.
본인 인증 후 구매내역을 확인하실 수 있습니다.

회원가입
서지반출
XPS STUDY OF CARBON NITRIDE THIN FILMS PREPARED BY ARC ION PLATING METHOD
[STEP1]서지반출 형식 선택
파일형식
@
서지도구
SNS
기타
[STEP2]서지반출 정보 선택
  • 제목
  • URL
돌아가기
확인
취소
  • XPS STUDY OF CARBON NITRIDE THIN FILMS PREPARED BY ARC ION PLATING METHOD
  • XPS STUDY OF CARBON NITRIDE THIN FILMS PREPARED BY ARC ION PLATING METHOD
저자명
Taki. Yusuke,Kitagawa. Toshihisa,Takai. Osamu
간행물명
Fabrication and Characterization of Advanced Materials
권/호정보
1995년|2권 4호|pp.613-617 (5 pages)
발행정보
한국재료학회
파일정보
정기간행물|ENG|
PDF텍스트
주제분야
기타
이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
서지반출

기타언어초록

Amorphous carbon nitride thin films were prepared in $N_2-H_2;and;N_2-He$ plasmas by arc ion plating(AIP) method. X-ray photoelectron spectroscopy(XPS) study revealed that nitrogen atoms were bonded with carbon atoms as the forms of $C{equiv}N$, C=N and C - N(not reliable) in the films. The decrease in $N_2$ partial pressure led N/C atomic ratio to be reduced from 0.3 to 0.1 because of the loss of reactive nitrogen in the systme. In the $N_2-H_2$ system, the component of the C=N bonding became predominant with the decrease in the $N_2$ partial pressure because hydrogen atoms terminated $sp^3$-carbon$ dangling bonds and nitrogen atoms were linked to carbon atoms located $sp^2$ sites.