The purpose of this research is to study on characteristics of corona ignitor which was designed for ignition of plasma, used at hard coating, surface treatment and thin film preparation, at high pressure. Corona ignitor composed of hollow type inner electrode and ring type external electrode. Though corona voltage increased with increasing distance between electrodes, corona discharge can be controlled stably. The gas flow in hollow type inner electrode and the construction between electrodes affect a length of corona flame and corona phenomenon. It is possible to ignite the . plasma, usually generated at low pressure(10 Torr), at high pressure(100 Torr) by corona ignitor.