To compare the quality of ultrastructural preservation of Scanning Electron Microscopic specimens dried with different methods; pure air-drying, air-drying with using Tetramethylsilane(TMS), four kind of air-drying using Hexamethyldisilazane(HMDS) and critical point drying(CPD), we conducted scanning electron microscopic observation on liver, skeletal muscle and intestinal tissues from laboratory rat treated with each method. In pure air drying group, severe distortion of tissue surface was observed, and in HMDS treated group, only liver tissue showed slight distortion. But in TMS treated group, each tissue showed a good presentation comparable to CPD group. The results suggest that the method of air-drying using TMS may be the former is less expensive and simple be and also time-saving.