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MBE로 성장시킨 ZnSe/GaAs의 고분해능 TEM에 의한 계면관찰
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  • MBE로 성장시킨 ZnSe/GaAs의 고분해능 TEM에 의한 계면관찰
  • HRTEM Observations on ZnSe/GaAs Interfaces Grown by MBE
저자명
이확주,류현,박해성,김태일,Lee. Hwack-Joo,Ryu. Hyun,Park. Hae-Sung,Kim. Tae-il
간행물명
한국전자현미경학회지
권/호정보
1995년|25권 2호|pp.65-72 (8 pages)
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한국현미경학회
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

The interfacial structures of ZnSe/GaAs which were grown by single chamber MBE at $300^{circ}C$ were investigated by high resolution transmission electron microscope working at 300 kV with resolution of 0.18 nm. The interfaces of ZnSe/GaAs whose thickness is 2,700 nm are wavy and extensive stacking faults were formed in ZnSe epilayer but the interfaces maintained the coherency with the substrate GaAs. The stacking faults are formed in {111} planes and their sizes are $10{sim}20nm$ in length and two or three atomic layer in width with the density of $10^9/cm^2$. Micortwins and moire fringes are also observed. However. in 10 nm ZnSe epilayer, the interfaces are pseudomorphic and only moire fringes are observed in local areas. The cylindrical defects which are perpendicular to the interface with $50{sim}60nm$ in length, were observed with the interval of 50 nm at ZnSe/GaAs interfaces in 2,700nm epilayer. The origin and character of these defects are unknown, however, they played a role of producing the structural defects at the interfaces.