An equilibrium analysis was carried out to determine principal species in the incineration of hazardous waste, which was assumed as a compound of hydrocarbon fuel, chlorine, sulfur, and heavy metals, and their behaviors with variation of temperature, chlorine and sulfur concentrations. Calculated results showed that the most important parameter influencing the principal species was temperature. Chlorine concentration affected on mole fractions of the species, especially at high temperature. Existence of sulfur had a significant effect on the species at low temperature, regardless of surfur concentration. Generally, principal species at high temperature were chlorides and oxides, while the principal species at low temperature were sulfides. As temperature increased, mole fractions of the principal species increased at low temperature, however, mole fractions of some metal species decreased at high temperature.