In this paper, a precision inspection technique using CAD/CAI integration is proposed for the parts having very thin and sharp 3 dimensional curve features. The technique begings with feature reconstruction of turbine blades which have 3 dimensional combined feometry, such as splines, and thin circles. The alifnment procedures consistsb of two phases-rough and fine phases : rough phase alignment is based on the conventional 6 point5s probing on the clear cut surfacef, and fine phase alignment is based on the intial measurement on the 3 dimensional curved parts using an lterative measurement feed-back least sequares technique for alignment. Forf the analysis of profile tolerance of parts, the actual measured points are obtained by finding the closet points on the CAD geometry by the developed subdivision technique and the Tschebycheff norm is applied based on iterative fashion, giving accurate profile tolerance value. The developed inspection technique is applied to practical procedures of blade manufacturing and demonstrated high performance.