In this study, in attempt to develop a new application technique of discharge plasma, we employed a kind of discharging method called SPCP ( short for Surface discharge induced Plasma Chemical Process). Applications of SPCP have been widely used for years. Compact ozonizers to deodorize household equipments like refrigerators we a part of such applications. We took advantages of the compactness and durability of the SPCP electrode to set up an experimental apparatus for decompositing vapor of aromatic hydrocarbons such as toluene, benzene and xylenes, which are major substances given off In painting or washing processes and aggravate working conditions. Results obtained from this study are summarized as follows. 1) Aromatic hydrocarbon vapors of up to 2,000ppm were almost thoroughly decomposed at the flow rate of 4ℓ/min or lower under the discharge with electric power of 400 Watts. 2) In dry air, as the decomposition progresses, tar-like substance deposits on the discharging areas, which deteriorated the decomposition rate in the end. This substance, however, was almost thoroughly removed by keeping discharge in dry air containing no solvent vapor.