- 포토에칭법에 의한 Digitron용 Grid제조에 관한 연구
- ㆍ 저자명
- 김만,이종권
- ㆍ 간행물명
- 한국표면공학회지
- ㆍ 권/호정보
- 1996년|29권 1호|pp.60-72 (13 pages)
- ㆍ 발행정보
- 한국표면공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
A photoetching process is widely used for small and high precision parts in machinery, electronic and semi-conductor industries. One of the high precision parts, grid is very important part of digitron which use electron display, and it is fabricated by only photoetching process because of high precision. In this study, to develop high precision digitron grid, characteristics of etching solution were investigated with electrochemical test, that was potentiodynamic test and immersion test in the ferric chloride solution and added some additives. Based on the electrochemical etching test, grid was fabricated by continuous photoetching process at various etching condition. From the result of measured line width and etching depth under-cut and etching factor were calculated. For the fabrication of 25$mu extrm{m}$ line width, optimal etching condition was etching temperature 40~$45^{circ}C$, spray pressure 1.5kg/$ extrm{cm}^2$ and etching time 3~4min.