The computer simulated CVD phase diagrams were completed by the stoichiometric algorithm. Three kinds of SiC/C FGMs: stepwise, semi-continuous, and continuous specimens were prepared according to the simulation. These three types of FGMs and SiC non-FGMs were compared through various thermal test and measurement. In overall judgment, the semi-continuously deposited FGM specimens out of three kinds showed excellent thermal properties as well as a good adhesion to each sub-layer.