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Interaction of Laser Beam with PZT - Target and Observation of Laser - Induced Plume and Particle Ejection
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  • Interaction of Laser Beam with PZT - Target and Observation of Laser - Induced Plume and Particle Ejection
  • Interaction of Laser Beam with PZT - Target and Observation of Laser - Induced Plume and Particle Ejection
저자명
이병우,Lee. Byeong-U
간행물명
韓國舶用機關學會誌
권/호정보
1996년|20권 5호|pp.93-102 (10 pages)
발행정보
한국마린엔지니어링학회
파일정보
정기간행물|ENG|
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

Laser-induced plume and laser-target interaction during pulsed laser deposition are demonstrated for a lead zirconate titanate (PZT). A KrF excimer laser (wavelength 248nm) was used and the laser was pulsed at 20Hz, with nominal pulse width of 20ns. The laser fluence was~$16J/cm^2,$ with 100mJ per pulse. The laser-induced plasma plume for nanosecond laser irradiation on PZT target has been investigated by optical emission spectra using an optical multichannel analyzer(OMA) and by direct observation of the plume using an ICCD high speed photography. OMA analysis showed two distinct ionic species with different expansion velocities of fast or slow according to their ionization states. The ion velocity of the front surface of the developing plume was about $10^7$cm/sec and corresponding kinetic energy was about 100eV. ICCD photograph showed another kind of even slower moving particles ejected from the target. These particles considered expelled molten parts of the target. SEM morphologies of the laser irradiated targets showed drastic melting and material removal by the laser pulse, and also showed the evidence of the molten particle ejection. The physics of the plasma(plume) formation and particle ejection has been discussed.