We measured an anisotropy inhomogeniety and dispersion of rf sputterd permalloy thin films by TBP(Transverse Biased Permeability) measurement method. Angular distribution function had a shape similar to the Lorentzian distribution, but magnitude distribution function deviates from the sysmetric Lorentzian distribution because of long tail to the region of a high Hk value. With increasing film thickness, the angular and magnitude anisotropy dispersion increased. The increase of angular dispersion was due to both the increase of grain size and local anisotropy in thicker films.