- 능동제어모세관을 이용한 유정압테이블의 운동정도 향상
- ㆍ 저자명
- Park. C.H.,Song. Y.C.,Lee. H.S.
- ㆍ 간행물명
- 한국정밀공학회지
- ㆍ 권/호정보
- 1997년|14권 12호|pp.114-120 (7 pages)
- ㆍ 발행정보
- 한국정밀공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
For compensating the error motion of hydrostatic tables, we have introduced a way that the clearance of table is controlled corresponding to the amount of eror with the actively controlled variable capillary, named as ACC. In previous paper, through the basic test, it was confirmed that by the use of ACC, the error motion within 2.7$mu$ m of a hydrostatic table could be compensated with the resolution of 27nm, 1/100 contollable range, and with the frequency bandwidth of 5.5Hz, structurally. In this paper, we performed practical compensation of the linear and angular motion error of hydrostatic table using ACC. For improving the compensated motion accuracy, iterative control method is put into the control system. The experimental results show that by the simultaneous compensation of error, the linear and angular motion error are improved upto 0.25$mu$ m and 0.4arcsec, which are about 1/10 and 1/3 of the non-compensated motion errors respectively.